Description¶

There are many supported recipes on the STS Pegasus four and STS Pegasus 6 Tools. These are create protected. Users make/import copies of the base recipes, then make adjustments to suit their wants. There are four DRIE recipes for etching silicon, described in detail below, as properly as an oxynitride recipe and numerous thinning recipes.

DRIE Recipes¶

• LNF Recipe 1
• LNF Recipe two
• LNF Recipe three
• Xmaint STD C4F8 dep

Oxynitride Recipe¶

Processes¶

• wafer thinning

Equipment¶

• STS Pegasus four
• STS Pegasus 6

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